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High Flatness Optics
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High Flatness Optics
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Ion Beam and Magnetorheological Processing Technology
The ion beam figuring (IBF) process is realized as the most precise technology of optical surface figure correction. A Gaussion formed beam of accelerated ions operating in a vacuum environment bombards into the surface of workpiece to remove the material by physical sputtering at the atomic level. AZYGO inter-ferometer was used to monitor the face shape of the optical elements, and the measured data were imported into the ion beam processing equipment for simulatio. Based on the different local surface shapes,the residence time of the ion beam spot on the workpiece surface is controlled to accurately process theultra-high surface shape.
Magnetorheological polishing is the use of polishing fluid that undergoes rheological behavior in a gradient magnetic field, resulting in a flexible "small grinding head" with viscoplastic behavior and rapid relative motion between the workpiece and the workpiece. This causes a significant shear force on the surface of the workpiece, resulting in the removal of surface materials. It is a contact polishing method without subsurface damage, and it is also fitted by importing test data into magnetorheological equipment to achieve deterministic processing.
CASTECH's ion beam and magnetorheological processing equipment can process large-size optical com-ponents with an outside diameter of 600 mm, which is suitable for precise control of the face shape of various optical materials.► Excellent stability of atomic level removal
► Contactless process without induced stress
► Flat, Spherical, Aspherical surfaces workable
► Surface quality PV < λ/40 achievable
Key words:- High Flatness Optics OPTICAL
- optical surface figure PV<λ/40
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